微小熱點之主動式冷卻

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姓名

張晊源(Zh-Yuan Chang ) 查詢紙本館藏

畢業系所

機械工程研究所

論文名稱

微小熱點之主動式冷卻
(nene)

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摘要(中)

應用於微小熱點( 50μm ×50μm)冷卻之各種冷卻法，諸如︰熱電冷卻法、微熱管冷卻、微管流冷卻等，受限於尺寸或是材質而難有理想之冷卻效率。本文採用微小液滴主動式冷卻，利用冷卻介質之相變化，直接帶走微小熱點上的熱而達到冷卻目的，以期能在微小光機電元件冷卻工程上有更新之突破。
本研究使用噴墨頭噴出單一微小液滴及連續液滴，兩種不同之冷卻方式冷卻熱輻射感測器，此感測器可輸入不同之電流，藉此可模擬不同溫度之微小熱點，另藉由量測感測器之電阻變化，可得知其上之溫度變化。
實驗結果顯示︰使用單一微小液滴冷卻，液滴蒸發時間僅需數百毫秒，且微小熱點冷卻後最大之溫度降可達 20℃，冷卻後溫度可約略低於室溫 5℃。而當使用5Hz連續液滴冷卻時，液滴不會堆積於微小熱點上，且可將微小熱點持續維持在較低之溫度。

關鍵字(中)

★ 微小液滴
★ 微小熱點
★ 微電子設備冷卻

關鍵字(英)

論文目次

摘要………………………………………………………………………….Ⅰ
Ⅱ 目錄……………………………………………………………………….Ⅱ
Ⅲ 表目錄…………………………………………………………………….Ⅳ
Ⅳ 圖目錄…………………………………………………………………….Ⅵ
第一章緒論………………………………………………………………….1
1-1前言………………………………………………………………….....1
1-2文獻回顧…………………………………………………………….....2
1-2-1微尺度熱傳……………………………………………………….....2
1-2-2液滴撞擊研究…………………………………………………….....4
第二章實驗方法…………………………………………………………...8
2-1實驗設備………………………………………………………….......8
2-1-1 微小液滴控制系統……………………………………………......8
2-1-2 微小熱點之模擬與溫度量測系統……………………………......9
2-1-3 影像擷取系統………………………………………………….....10
2-1-4 微調定位系統 ………………………………………………......10
2-2實驗步驟…………………………………………………………......11
2-3實驗分析…………………………………………………………......13
2-3-1 150 μm ×150 μm之感測器實驗分析……………………......13
2-3-2 50 μm ×50 μm之感測器實驗分析………………………......13
第三章結果與討論………………………………………………………..15
3-1實驗一:單一微小液滴冷卻150μm ×150μm之微小熱點……......15
3-2實驗二:連續液滴冷卻150μm ×150μm之微小熱點..............17
3-3實驗三: 單一液滴冷卻50μm ×50μm之微小熱點….............18
第四章總結…………………………………………………………………20
A.文獻回顧………………………………………………………………….21
B.附表……………………………………………………………………….24
C.附圖……………………………………………………………………….46

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指導教授

周復初(Fu-Chu Chou)

審核日期

2001-6-29

推文